1. Introduction Introduction to vacuum, history, pressure units, basic thermodynamics, equation of state, kinetic theory of gases, pressure vs. particle concentration in volume, ideal and real gas, gas vapours and vapour tension. Vacuum in nature, science and industry. 2. Processes in gas volume Thermal transpiration, diffusion, heat transfer, momentum transfer, molecular processes in gases. 3. Gas-surface interaction Particle binding, adsorption, physical and chemical adsorption, cosine law, movement of adsorbed molecules, migration of molecules on the wall, evaporation, saturation vapour pressure. 4. Processes in the walls of vacuum systems Gas flow through leaks, capillary condensation, absorption, diffusion and gas permeation by compact substances. 5. Gas flow Definitions and types of flow, Knudsen and Reynolds number, viscous and laminar flow, conductivity of pipes, flow relationships and calculations (tube, diaphragm, elbow, complex geometry), conductivity measurements. 6. Methods of obtaining low pressures - physics of pumping Vacuum system, pressure drop over time, pumping rate, effective pumping rate, reverse flow, back pressure, compression ratio, pressure distribution in vacuum systems, analogy with electrical circuit. 7. Transport vacuum pumps Working chamber pumps (piston, diaphragm, rotary and oil pumps, dry scroll pumps), impulse transfer pumps (molecular, turbomolecular, Roots, oil diffusion) 8. Sorption pumps Pumps based on molecular binding (adsorption, cryosorption, chemisorption), condensation pumps, sorption and cryosorption pumps, gettering methods, ion pumps. 9. Pressure measurements Absolute measuring methods, liquid manometers, membrane manometers (baratron), molecular manometers, indirect measuring methods, thermal manometers (Pirani gauges), ionization manometers, Pennig gauges, sorption measuring methods. 10. Measurement of partial pressures, vapour tension, leak detection Leakage, leak detection, mass spectrometry for leak detection, mass spectrometers, vapour tension measurement, gas flow measurement, virtual leakage. 11. Vacuum systems + laboratory excursion Design of vacuum systems, vacuum chambers, components, design, rules, vacuum-tight connections, vacuum components (pumps, manometers, flanges, pipes and gas distribution, valves, feedthroughs pumping process, etc.). Lab tour. 12. Vacuum technology in praxes Vacuum technology manufacturers - overview, vacuum materials (oils, ceramics, metallic materials, plastics, vacuum compatibility). Technological processes using vacuum and low pressures - overview.
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